Fully Automatic Pressure Curing Oven – PCO 1300

A Fully automatic Pressure Curing Oven with 300mm EFEM.

• Oven Size (mm): 2,200[W] x 2,200[D] x 2,475[H]
• Chamber Usable Area (mm): 560[W] x 680[D] x 480[H]
• Max Operating Pressure: 20 bar (290 psi)
• Max Operating Temperature: 260⁰ C
• Nitrogen Enabled (option)
• Cleanroom Class 100 (option)
• Vacuum down to 5 Torr (option)
• Fully Automatic Loading with EFEM (300mm wafer)