Manual Batch Pressure Curing Oven – PCO 500

Manual loading Batch Pressure Curing Oven with conduction heating plate option for 300mm wafers.

• Oven Size (mm): 1,800[L] x 1,400[W] x 1,700[H]
• Chamber Usable Area (mm): 350[L] x 350[W] x 227[H]
• Max Operating Pressure: 12 Bar (174 psi)
• Max Operating Temperature:
  • 200⁰ C (Forced Air Convection)
  • 350⁰ C (Conduction Plate Option)
• Manual Loading
• External Chiller Option

Optional conduction plate inside pressure chamber.

System Air Flow (Top Down)